Characteristics of titanium target vacuum coating!

Release time：2022-03-14 15:55:28 丨 Number of visits：

Most of the new sputtering devices use a powerful magnet to spiral the electrons to accelerate the argon ionization around the target, resulting in an increase in the probability of collision between the target and the argon ion, and increase the sputtering rate. Dc sputtering is generally used for metal coating, while RF AC sputtering is used for non-conductive ceramic materials. The basic principle is to impact Ar ions on the target surface by glow discharge in vacuum, and the cation in plasma will accelerate to the negative electrode surface as the sputtering material. This impact will cause the target material to fly out and deposit on the substrate to form a thin film. Some characteristics of sputtering titanium alloy target coatings are shared below.

(1) Metal, alloy or insulation can be made into film materials.

(2) Under appropriate conditions, multiple and complex targets can be made into the same composition of the film.

(3) By adding oxygen or other active gases in the discharge atmosphere, mixtures or compounds of target material and gas molecules can be made.

(4) Target input current and sputtering time can be controlled, easy to get high precision film thickness.

(5) compared with other processes to produce large area of uniform film.

(6) Sputtering particles are not affected by gravity, target and substrate position can be freely arranged.

(7) The adhesion strength of the substrate and the film is more than 10 times that of the general steam coating film, and because of the high energy of the sputtering particles, the hard and dense film will continue to diffuse on the surface of the film forming surface. At the same time, the high energy makes the substrate as long as the lower temperature can get the crystal film.

(8) High nucleation density at the initial stage of film formation, which can produce extremely thin continuous film below 10nm.

(9) The target material has a long life and can be automated and continuous production for a long time.

(10) Titanium alloy target material can be made into various shapes, with the special design of the machine to do better control and the most efficient.