Application of high purity titanium target material!

Release time：2022-05-19 18:23:54 丨 Number of visits：

As we all know, purity is one of the main performance indexes of target material. In practice, the purity of target material is also different. Compared with ordinary industrial pure titanium, high purity titanium is expensive and has narrow application range. Mainly used to meet the needs of some special industries. So, what is the main application of high purity titanium target material?

The application of high purity titanium target material mainly includes:

1. Biomaterials

Titanium is a non-magnetic metal, in a strong magnetic field will not be magnetized, good compatibility with human body, non-toxic side effects. It can be used to make human implant devices. General medical titanium materials do not reach the level of high purity titanium, but considering the dissolution of impurities in titanium, the purity of titanium used in implants should be as high as possible. High purity titanium wire can be used as biological binding material. In addition, titanium injection needles embedded in the catheter also reached high purity titanium levels.

2. Decorative materials

High purity titanium has excellent atmospheric corrosion resistance, long-term use in the atmosphere will not change color, to ensure the original natural color of titanium. Therefore, high purity titanium can also be used as building decoration materials. In addition, in recent years, some high-end accessories and some wearable items, such as bracelets, watches and spectacle frames, have been made of titanium, taking advantage of its properties, such as corrosion resistance, non-discoloration, long-term luster and non-sensitivity to contact with human skin. Some decorative titanium has reached grade 5N purity.

3. Aspirating material

As a very chemically active metal, titanium can react with many elements and compounds at high temperatures. High purity titanium has a strong adsorption effect on active gases such as O2, N2, CO, CO2 and water vapor above 650℃. The evaporation Ti film on the pump wall can form a surface with high adsorption capacity. This characteristic makes Ti widely used as a getter in ultra-high vacuum pump systems. If used for sublimation pump sputtering ion pump, the limit working pressure sputtering ion pump can be reduced to 10-9Pa.

4. Electronic information materials

In recent years, with the rapid development of semiconductor technology, information technology and other high-tech fields, the application of high-purity titanium in sputtering target, integrated circuit, DRAMs and flat panel display is more and more, the purity of titanium materials is also more and more high. In semiconductor vlSI industry, ti - si compound, ti - n compound and w - ti compound are used as diffusion barrier layer and wiring material for control electrode. Sputtering is used to manufacture these materials, and the titanium target used in sputtering requires high purity, especially the content of alkali metal elements and radioactive elements is very low.

In recent years, the sputtering equipment also began to use the same purity of sputtering titanium target high purity titanium. At present, the purity of titanium is required to reach 4N5 (99.995%) ~5N (99.999%) for 4-megabit VLSI, and 6N (99.9999%) for 16-megabit third-generation VLSI.